AccuFiz Large Apertures
Measure optics to 800 mm diameter with the resolution and flexibility of a standard 4″ interferometer.
We’ve completely redefined large aperture beam expanders: more convenient, high precision, and lighter than you’d expect.

Measure optics to 800 mm diameter with the resolution and flexibility of a standard 4″ interferometer.
AccuFiz Large Aperture Interferometers
4D Technology large optics accessories let you measure optics up to 800 mm in diameter using a standard, 100 mm aperture AccuFiz interferometer. Now you can take advantage of the high wavefront quality and reliability of a standard AccuFiz to measure large flats and large-diameter curved surfaces.
4D compact, high performance aperture converters produce collimated test beams of up to 800 mm diameter. Kinematic mounting makes it possible to quickly remove the AccuFiz for stand-alone operation, then to return the instrument to the aperture converter with no need for re-alignment. A visible wavelength, coarse alignment laser makes it easy to quickly rough align the reference and test optics.
4D mounts provide highly repeatable tip and tilt of the test and/or reference optics. The return mount includes rotation to aid 3-flat testing and other measurements. The reference tip/tilt mount includes a piezo-actuated phase shifter for temporal measurements. Single Ethernet cables connect the mounts to the AccuFiz for fast, easy setup.
A range of transmission and return flats are available, with λ/10 or λ/20 wavefront quality.

AccuFiz SWIR
Operating at
1.55 µm

AccuFiz LWIR
Operating at
10.6 μm
Need to know more?
Get a quote, or advice on your application. Or download the Fact Sheet which explains much of how a Fizeau can work for you.
What to expect
The AccuFiz family includes wavelengths from visible (632.8nm) through IR (10.6μm). Apertures of
100mm (4”) and 150mm (6”) are available. Beam expanders are available to convert the 4” aperture to 150mm (6″),
300mm (12″), 600mm (24”) and 800mm (30″). Unstabilized and stabilized sources are offered. Stabilized sources provide higher power and a longer coherence length which does not drift with temperature, simplifying long-cavity measurements.
Table 1 shows the available AccuFiz models.
AccuFiz Model | Stabilized Laser | Wavelength | Camera | Extended Source | Optical Zoom |
B100, B150 | No | 633 nm | 512 x 512, 12-bit | No | No |
E100, E150 | No | 633 nm | 1.44 MP, 12-bit | Yes | Optional 6X |
E100S, E150S | Yes | 633 nm | 1.44 MP, 12-bit | Yes | Optional 6X |
H100S, H150S | Yes | 633 nm | 6 MP, 12-bit | Yes | No |
E100-532, E150-532 | Yes | 532 nm | 1.44 MP, 12-bit | Yes | Optional 6X |
S100-1053, S150-1053 | Yes | 1053 nm | 1.44 MP, 12-bit | Yes | Optional 6X |
SWIR | Yes | 1550 nm | 512 x 512, 12-bit | Yes | No |
LWIR | Yes | 10.6 µm | 512 x 512, 12-bit | Yes | Yes, 2X |
All models available with 100 mm (4”) or 150 mm (6”) aperture. |
Download the AccuFiz Specifications Sheet
Need to understand how it works? Download the AccuFiz Facts Sheet
4D supplies a turnkey interferometric system:
- Interferometer Mainframe
- Advanced software for taking measurements and analyzing the results
- Complete computer system
- Connecting cables and power supplies
Accessories include:
- Multi-axis mounting and aligning the mainframe
- Optical mounts
- Reference optics (flat or spheres)
- Linear guides
- Look-down or look-up stands
- Beam expanders
- Beam compactors
4Sight™ wavefront analysis software, included with every AccuFiz, features excellent ease of use and a short learning curve. 2D and 3D displays, filtering, thresholds and masking tools make it easy to highlight surface shape and texture. Zernike, Seidel, geometric and diffraction analyses are easy to perform. Comprehensive data sharing capabilities let you read, write, save and print data in many common file formats for comparison between instruments. Optional 4Front™ software enables real-time measurement for system alignment, and fast averaging of many datasets.
- Adjustable Extended Source
- Surface Isolation Source
- Dynamic Interferometry mode
- Optical Zoom
- Radius of Curvature
Highlighted Features
Compact and Lightweight
The AccuFiz is extremely easy to use in confined lab spaces. Its compact, lightweight design is extremely rigid for maximum stability in any orientation or environment.
Smart Zoom
Only AccuFiz includes Smart Zoom™ to ensure accurate lateral resolution over the entire 1X–10X zoom range.
So configurable
A range of laser sources, aperture sizes, mounting components and accessories provides flexibility for a wide range of applications and budgets.
data
analysis software

Fizeaus and optical production
AccuFiz and FizCam fizeaus are well suited to optics manufacturing.
- Qualify shape and mid-spatial frequencies
- Measure flats, spheres, cubes and mirrors
- Wavefront transmission quality measurements
- Fast and precise
- Use in Aerospace, Semiconductor and Optics industries
Call to action?
Get a quote, or advice on your application.
AccuFiz Variety

High resolution
Highest available resolution for measuring steep slopes, aspheric surfaces and small diameter optics

Large Aperture
You’ll love our clever beam expander designs for apertures up to 800 mm.

Infra red
Short, long and dual wave Infra-red metrology systems.

Surface Isolation
Short coherence source allows isolation of the surfaces of plane-parallel optics.
Get In Touch
(520) 294-5600
Location
3280 E Hemisphere Loop, Ste 146
Tucson, AZ 85706
4Dinfo@ontoinnovation.com
Office Hours (Arizona Time)
Mon: 8am – 5pm
Tue: 8am – 5pm
Wed: 8am – 5pm
Thur: 8am – 5pm
Fri: 8am – 5pm
Sat: Closed
Sun: Closed
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